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Micro Flow Sensor
（Model：F1022）
Manual
Version：2.0
Valid From：2014.05.01
Zhengzhou Winsen Electronics Technology Co., Ltd

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Statement
This manual copyright belongs Zhengzhou Winsen Electronics Technology Co., LTD. Without the
written permission, any part of this manual shall not be copied, translated, stored in database or
retrieval system, also can’t spread through electronic, copying, record ways.
Thanks for purchasing our product. In order to let customers use it better and reduce the faults
caused by misuse, please read the manual carefully and operate it correctly in accordance with the
instructions. If users disobey the terms or remove, disassemble, change the components inside of
the sensor, we shall not be responsible for the loss.
The specific such as color, appearance, sizes &etc, please in kind prevail.
We are devoting ourselves to products development and technical innovation, so we reserve the
right to improve the products without notice. Please confirm it is the valid version before using this
manual. At the same time, users’ comments on optimized using way are welcome.
Please keep the manual properly, in order to get help if you have questions during the usage in the
future.
Zhengzhou Winsen Electronics Technology CO., LTD

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Zhengzhou Winsen Electronics Technology Co., Ltd
F1022 Micro Flow Sensor
www.winsen-sensor.com
Profile
F1022 micro flow sensor adopts thermodynamic principle
to detect the gas flow, and it has high accuracy and good
repeatability. The built-in temperature sensor makes the
product has the function of professional temperature
compensation calibration. At the same time, the output is
linear analog voltage which is convenient to use.
Features
Latest MEMS Sensor chip technology
High accuracy, quick response, good repeatability
Detection micro flow accurately
It is calibrated completely and temperature compensated
Main Applications
Industrial process control
Air and environment protection
Portable detector
Technical Parameters
Stable1.Technical Parameters
Model
F1022
Measuring Range① 2、5、6、10、12、15、20 SLM②
Min Typical Max
Full Scale Output 4.90 5.00 5.10
Zero Output 0.96 1.00 1.04
Output Impedance - 200 -
Working Voltage 7.0 10.0 14.0
Working Current 15 25 30
Accuracy
- ±1.5 ±2.5
Repeatability
Annual Drift③
- ±0.3 ±0.5
- ±0.1 ±0.5
Pressure range④ - - 200
Unit
V
V
Ω
V
mA
%F.S
%F.S
%F.S
kPa
Pins Definition
Response Time 5
Working Temp.⑤ -25
10
-
15 ms
65 ℃
Pin Function
1 GND
2 VCC
Storage Temp. -40 -
90 ℃
3
OUT
Stable 2.Pins definition
Tel: 86-371-67169097/67169670 Fax: 86-371-60932988
Email: sales@winsensor.com
Leading gas sensing solutions supplier in China!

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Zhengzhou Winsen Electronics Technology Co., Ltd
www.winsen-sensor.com
Note:
①The measuring range within 2-20SLM is available and regular measuring ranges such as 2、5、6、
10、12、15、20 SLM. Customized fee will be charged for other ranges.
②Standard-state: gas temperature is 0℃ and pressure is 101.325 kPa.
③The testing environment is room temperature and clear air.
④The pressure range of 1 MPa can be customized.
⑤The temperature compensation is for the tem. range of 0-50℃ and the compensation
performance can’t be ensured beyond the temperature range.
Calculation for Airflow
Actual flow=full scale * (sensor actual output voltage-zero output voltage) / (full scale output
voltage-zero output voltage)
For example: the sensor full scale is 10 SLM, the sensor zero output voltage is 1V and full scale
output voltage is 5V, and the actual output is 2.5V.
Then, the actual flow=10SLM * (2.5V - 1V)/(5V- 1V) = 3.75SLM
Naming Rule
F1 0 2 2 - □- □- □
Actual measuring range
Standard gas:A-air;N-nitrogen;O-oxygen;CH4-methane......
Output voltage：A:0-5V B:1-5V C:0.5-4.5V
Serial number
Range: 0：0-20sccm;1：0-2SLM;2：0-20SLM;3：0-200SLM
Product feature：0-ordinary;1-customized;2-Low power consumption
Flow sensor code
Cautions
1. Prohibit to use it in strong corrosive gas, toxic gas, explosive gas environment.
2. If measured gas medium contains dirt, the sensor’s lifespan will be shorten. We suggest users equip
the sensor flow inlet with 5 micrometer precise filter.
3. The sensitivity of the product will reduce or be damaged if it contacts to water.
4. The wrong connecting of power supply will damage the internal circuit.
Zhengzhou Winsen Electronics Technology Co., Ltd
Add: No.299, Jinsuo Road, National Hi-Tech Zone,
Zhengzhou 450001 China
Tel: +86-371-67169097/67169670
Fax: +86-371-60932988
E-mail: sales@winsensor.com
Website: www.winsen-sensor.com
Tel: 86-371-67169097/67169670 Fax: 86-371-60932988
Email: sales@winsensor.com
Leading gas sensing solutions supplier in China!