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MEMS Airflow Sensor
D6F-10A, -20A, -50A
Compact, intelligent sensor featuring
MEMS technology for precision mass
airflow measurement
• Precision mass airflow up to 50 slpm
• Stable output across full scale
• Horizontal mounting feature with *NBR ‘O’ ring option
• Compact size 78 (L) x 30 (W) x 30 (H) mm
• Low power consumption
* NBR material recommended for all applications including
medical and food processing
Application Examples
• Industrial processes
• Medical Respirators and Ventilators
• MiG and TiG welding systems
• Anesthesia Delivery
• Mass flow controllers
• Scientific / test equipment
• Fuel cell controls
Ordering Information
Model
D6F-10A5
D6F-20A5
D6F-50A5
D6F-10A6
D6F-20A6
D6F-50A6
D6F-Cable1
Case
Thermoplastic resin / Aluminum alloy
Thermoplastic resin / Aluminum alloy
Thermoplastic resin / Aluminum alloy
Thermoplastic resin / Aluminum alloy
Thermoplastic resin / Aluminum alloy
Thermoplastic resin / Aluminum alloy
Applicable Gas
Air, N2O, O2
Air, N2O, O2
Air, N2O, O2
Air, N2O, O2
Air, N2O, O2
Air, N2O, O2
Rating
Absolute maximum rating
Item
Power-supply voltage
Output voltage
VCC
VOUT
Term
26.4
6
Flow Range
0 – 10 LPM
0 – 20 LPM
0 – 50 LPM
0 – 10 LPM
0 – 20 LPM
0 – 50 LPM
Ratings
Notes
Built-in orifice, Right-angle Connect
Built-in orifice, Right-angle Connect
Built-in orifice, Right-angle Connect
Built-in orifice, Straight Connect
Built-in orifice, Straight Connect
Built-in orifice, Straight Connect
Optional (recommended)
VDC
VDC
Unit
MEMS Airflow Sensor D6F-10A, -20A, -50A
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Electrical Performance
Recommended operation condition and DC characteristic
Item
Power-supply voltage
Operating temperature
Maximum output voltage
Minimum output voltage
VCC
TOPR
VOH
Term
VOL
Condition
VCC = 12VDC to 24VDC
IOH = 0.5mA
VCC = 12VDC to 24VDC
IOL = -0.5mA
MIN
10.8
-10
5
0
TYP
MAX
26.4
60
5.7
Unit
VDC
°C
VDC
1 VDC
Basic Performance
0 to 50 min. (Normal). L/min (Normal) volumetric flow rate at 0° C, 101 3kPa.
Measurement condition: Power-supply voltage 12 ±0.1VDC, ambient temperature 25 ±2° C and ambient air humidity 25 to 75% RH.
D6F-10A
Flow Rate L/min (normal)
Output Voltage (VDC)
D6F-20A
0
1.00 ±0.12
2
1.75 ±0.12
4
2.60 ±0.12
6
3.45 ±0.12
8
4.25 ±0.12
10
5.00 ±0.12
Flow Rate L/min (normal)
Output Voltage (VDC)
0
1.00 ±0.12
4
1.93 ±0.12
8
2.87 ±0.12
12
3.70 ±0.12
16
4.41 ±0.12
20
5.00 ±0.12
D6F-50A
Flow Rate L/min (normal)
Output Voltage (VDC)
0
1.00 ±0.12
10
2.45 ±0.12
20
3.51 ±0.12
30
4.20 ±0.12
40
4.66 ±0.12
50
5.00 ±0.12
Characteristics
Degree of Protection
Applicable Gas
Electrical Connection
Output Signal
Current Consumption
Repeat Accuracy
Insulation Resistance
Dielectric Strength
Withstand Pressure
Operating Temperature
Operating Humidity
Storage Temperature
Storage Humidity
Weight
IP40
Air
Connector (3 wire)
Analog, 1-5VDC (load resistance 10kohm min)
Max 15mA (no load, VCC = 12 to 24 VDC, VSS = GND = 0V, 25° C)
+/- 3% FSD max, 25° C
20Mohm min. (500VDC between lead terminals and case)
500VAC, 50/60Hz for 1 minute (leakage current typ. <1mA) between lead terminals
500 kPa
-10 to +60° C (with no ice or dew condensation)
85%RH max. (with no ice or dew condensation)
-40 to +80° C (with no ice or dew condensation)
85%RH max. (with no ice or dew condensation)
About 103 grams
Optional: Versions for N2O and O2 also available. For Ar + CO2, He, and He + O2, please consult factory.
2 MEMS Airflow Sensor D6F-10A, -20A, -50A

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Installation: D6F-10A5-000, D6F-20A5-000, D6F-50A5-000
Recommendation for right-angle connection
Tighten screw with 0.59Nm or less torque. Use M3 pan head screw.
Please seal to INLET and OUTLET with the ‘O’ ring etc. Please
install the product as shown below.
Recommended ‘O’ ring for sealing inlet and outlet orifice
Material: NBR70 (recommended)
Example part number: JASO part number: CO 0003
Alternative manufacturers with similar DO and W dimensions may be
used
Precautions
1. Avoid use in excessively dirty, wet environments
2. Do not use in the presence of flammable gases (e.g. hydrogen,
methane, ethane) and liquefied petroleum gas. In addition, do not
use with corrosive gases (e.g. chlorine, sulphur, acids, alkalis,
etc.).
3. Install in the direction of the arrow indicated.
4. For best results (optimum accuracy), mount horizontally.
5. Use four suitable M3 screws for mounting. Do not exceed a fixing
torque of 0.59 Nm.
6. Do not modify D6F- in any way.
7. Do not place any object in or close to the inlet and outlet orifices.
8. Do not use the sensor in any of the following environments:
a location that receives radiant heat from the sun or apparatus
a place where intense light may radiate down
places where corrosive gas, especially sulphur and ammonia
gases are present
where fast changing temperatures occur
locations prone to freezing, high humidity, condensation
places where large magnitudes of vibration or shock could occur
9. Noise countermeasures: VERY IMPORTANT: Take suitable pre-
cautions to minimize the effects and potential for induced electri-
cal noise. Install away from apparatus that generates strong high
frequencies, surges and spikes. Take particular care to install
away from AC power transformers, live mains power lines and
high power magnetic circuits. Attach a surge suppressor and a
noise filter to the peripheral equipment.
10.Ensure good grounding is achieved by grounding the GND termi-
nal to the peripheral equipment’s main ground frame connection
and its associated regulated power supply.
11.Do not make a direct solder connection to the integral terminals. It
is recommended you use the optional cable ‘D6F-CABLE1’ for
attachment and to ensure correct connection.
12.D6F- is a precision component. Keep in original packaging and
remove only when ready for installation. Damage may occur if
subjected to excessive force (e.g. dropped or kicked). Any item
suspected to be damaged should be discarded.
13.Immediately following installation, a qualified person should per-
form checks to ensure safe, satisfactory operation.
MEMS Airflow Sensor D6F-10A, -20A, -50A
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Dimensions: D6F-10A5-000, D6F-20A5-000, D6F-50A5-000
All dimensions are shown in millimeters.
D6F-Cable1 (Optional)
4 MEMS Airflow Sensor D6F-10A, -20A, -50A

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D6F-10A6-000, D6F-20A6-000, and D6F-50A6-000
MEMS Airflow Sensor D6F-10A, -20A, -50A
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